Clean Gas Filter
Series | Operating pressure | Filtration |
SFC100 ![]() |
Max. 1.0MPa (Vacuum: 1.3 x 10-6kPa) |
0.01μm |
Features | Compact disposable type for semiconductor industry |
Series | Operating pressure | Filtration |
SFC100 ![]() |
Max. 1.0MPa (Vacuum: 1.3 x 10-6kPa) |
0.01μm |
Features | Compact disposable type for semiconductor industry |