Refrigerated Thermo-chiller

Series/ CAD	Set temperature range	Cooling capacity	Temperature stability	Cooling method	Circulating liquid
HRZ	-20 to 90 ºC	1.8 to 10 kW	±0.1 ºC	Water-cooled refrigeration	Fluorinated liquid, Clear water, Deionized water, Ethylene glycol aqueous solution
Features	In addition to the state-of-the-art functions of the HRZ series, these models employ a DC inverter compressor to achieve better energy efficiency. Wide temperature range and cooling capacity range covered by one unit Suited to the short innovation cycle of semiconductor equipment, and capable of responding flexibly to changes in the process conditions. Conforms to UL and SEMI specifications, CE marking.