Slit Valve

Series/CAD	Operating pressure range (Pa)	Fluid	Gate size (Height x Width) (mm)	Operating pressure (MPa)
XGT	Atmospheric pressure to 1x10^-6	Inert gas type vacuum	32 x 222 46 x 236 50 x 336	0.45 to 0.6
Features	Suitable for use as a block disk between the load lock chamber and transfer chamber, or the transfer chamber and process chamber, of semiconductor equipment