Water-cooled Thermo-chiller

Series/ CAD	Set temperature range	Cooling capacity	Temperature stability	Cooling method	Circulating liquid
HRW	20 to 90 ºC	2 to 30 kW	±0.3 ºC	Water-cooled refrigeration	Fluorinated liquid, Clear water, Deionized water, Ethylene glycol aqueous solution
Features	Direct heat exchanger for water circulated within a plant For temperature regulation within the temperature range where no freezer is needed Proven performance with semiconductor process equipment, with a wide range of features such as high temperature stability, wide temperature range, failure testing, external signal. Conforms to UL and SEMI specifications, CE marking.