Refrigerated Thermo-chiller

Series/ CAD	Set temperature range	Cooling capacity	Temperature stability	Cooling method	Circulating liquid
HRZ	-20 to 40 ºC	1 to 15 kW	±0.1 ºC	Water-cooled refrigeration	Fluorinated liquid, Clear water, Deionized water, Ethylene glycol aqueous solution
	20 to 90 ºC
	-20 to 90 ºC
Features	Proven performance with semiconductor process equipment, with a wide range of features such as high temperature stability, wide temperature range, failure testing, external signal. All models conform to safety standards. Conforms to UL and SEMI specifications, CE marking.