Clean Air Module

Series/CAD	Fluid	Set pressure	Flow range L/min (ANR)
LLB3	Clean air N₂gas^NOTE)	0.05 to 0.4 MPa	5 to 100
LLB4	Clean air N₂gas^NOTE)	0.05 to 0.4 MPa	50 to 500
Features	Clean equipment modularized (Reduction of piping labor/Space-saving) Clean air is easily available. Nominal filtration rating: 0.01 μm (Filtration efficiency 99.99%) Wetted parts: Grease-free, Silicone-free Assembled in a clean room, shipped and packed in a duplicate package 24 combinations available