Clean Gas Filter
| Series | Operating pressure | Filtration |
| SFC100 |
Max. 1.0MPa (Vacuum: 1.3 x 10-6kPa) |
0.01μm |
| Features | Compact disposable type for semiconductor industry | |
| Series | Operating pressure | Filtration |
| SFC100 |
Max. 1.0MPa (Vacuum: 1.3 x 10-6kPa) |
0.01μm |
| Features | Compact disposable type for semiconductor industry | |